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洲凯晶纯® UHP 316L VV(VIM+VAR)

Ultra-pure UHP 316L VV meeting SEMI F20 standards

 

Manufacturing Process: Produced using specialized melting equipment including the American Consarc Vacuum Induction Melting (VIM) furnace, American Consarc Electroslag Remelting (ESR) furnace, and German ALD Vacuum Arc Remelting (VAR) furnace. This process ensures the production of ultra-high-purity UHP 316L material that meets SEMI F20 international standards, maximizing the removal of impurities and gases. With exceptionally low levels of sulfur (S), phosphorus (P), and manganese (Mn), this material offers superior purity while specifically preventing the generation of harmful "manganese fumes" during welding. It is the preferred choice for components in semiconductor equipment operating in highly sensitive environments.

Process Reaction Chamber (Process Chambers)
Include CVD (Chemical Vapor Deposition), ALD (Atomic Layer Deposition), the chamber of an etching apparatus. Because manganese smoke will pollute the chamber environment during welding, this kind of equipment usually adopts ultra-pure UHP 316L VV plate with low manganese to prevent pollution from the source.
Ultra-high purity gas/chemical delivery system
(UHP Fluid Delivery Systems)
Includes diaphragm valves, pressure regulating valves, fittings, VMB (valve Manifold box) and gas cabinets. In order to meet the requirements of corrosion resistance and low particles, the parts in contact with the process medium (such as the valve body) are mostly ultra-pure UHP 316L VV and are electropolished (EP).
Critical vacuum components and piping
Such as ultra-high vacuum chambers, transfer pipes and liners. In order to prevent degassing or minor leakage, ultra-pure UHP 316L VV EP seamless pipe with very few inclusions and no leakage rate is required.

Use of 洲凯晶纯® UHP316L VV in the semiconductor industry

Fujian Zhoukai New Material Co., Ltd. Representative Products
High temperature alloy class:
National standard American Standard ASTM German standard DIN Japanese Standard JIS British Standard BS
GH4169 N07718 2.4668 NCF718 IN718
GH2132 A286 1.4980 SUH660 DTD5026
GH6600 N06600 2.4816 NGF600 NA14
GH3625 N06625 2.4856 NCF625 NA21
Corrosion Resistant Alloys:
National standard American Standard ASTM German standard DIN Japanese Standard JIS British Standard BS
H08810 N08810 1.4958 NCF800H NA15(H)
H08825 N08825 2.4858 NCF825 NA16
NS3105 N06690 2.4642 --- ---
NS143 N08020 2.4660 --- ---
GH605 N05500 2.4375 --- ---
GH617 N06617 2.4663 NW6617 ---
NS3308 N06022 2.4602 --- ---
NS3304 N10276 2.4819 NW0276 NC17D
Ultra high strength steel:
National standard American Standard ASTM German standard DIN Japanese Standard JIS British Standard BS
D406A --- --- --- ---
--- A100 --- --- ---
06 Cr13Ni8Mo2Al S13800 1.4534 SUS1380 X5CrNiMoAl13-8-2
40 CrNi2Si2MoVA 300M 1.6928 --- ---
40CrNiMOV 4340 1.6562 SNCM439 EN24
00Ni18Co8Mo5Ti Al (F141) C250 --- --- ---
High temperature bearing steel:
National standard American Standard ASTM German standard DIN Japanese Standard JIS British Standard BS
G102Cr18Mo S44004 1.4125 SUS440C X105CrMo17
8 Cr4Mo4V M50 --- --- ---
G13Cr4Mo4Ni4V M50NiL --- --- ---